Characterization study of bonded and unbonded polydimethylsiloxane aimed for bio-micro-electromechanical systems-related applications
نویسندگان
چکیده
منابع مشابه
Micro- and nano-electromechanical systems for [bio]molecular analysis
[Bio]chemical sensors, defined as devices which convert a chemical state into an electrical signal [1], have been the subject of a strong development during the past few decades. A sensor has essentially two parts (Fig. 1): a detecting element, in which the presence of an external stimulus produces a change of some property (optical, mechanical, electrical ...), and a transducing element, which...
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ژورنال
عنوان ژورنال: Journal of Micro/Nanolithography, MEMS, and MOEMS
سال: 2007
ISSN: 1932-5150
DOI: 10.1117/1.2731381